Abstract
Developing a miniatured laser vibrometer becomes important for many engineering areas, such as experimental and operational modal analyses, model validation, and structural health monitoring. Due to its compact size and light weight, a miniatured laser vibrometer can be attached to various mobilized platforms, such as an unmanned aerial vehicle and a robotic arm whose payloads can usually not be large, to achieve a flexible vibration measurement capability. However, integrating optics into a miniaturized laser vibrometer presents several challenges. These include signal interference from ghost reflectance signals generated by the sub-components of integrated photonics, polarization effects caused by waveguide structures, wavelength drifting due to the semiconductor laser, and the poorer noise characteristics of an integrated laser chip compared to a non-integrated circuit. This work proposes a novel chip-based high-precision laser vibrometer by incorporating two or more sets of quadrature demodulation networks into its design. An additional set of quadrature demodulation networks with a distinct reference arm delay line length can be used to conduct real-time compensation to mitigate linear interference caused by temperature and environmental variations. A series of vibration measurements with frequencies ranging from 0.1 Hz to 1 MHz were conducted using the proposed laser vibrometer to show its repeatability and accuracy in vibration and ultrasonic vibration measurements, and its robustness to test surface conditions. The proposed laser vibrometer has the advantage of directly measuring the displacement response of a vibrating structure rather than integrating its velocity response to yield the measured displacement with a conventional laser Doppler vibrometer.