Abstract
We report successful compensation of the thermally induced laser beam distortion associated with high energy 110 mJ and high average power femtosecond laser system of 11 Watts operated with vacuum compressor gratings. To enhance laser-based light source brightness requires development of laser systems with higher energy and higher average power. Managing the high thermal loading on vacuum optical components is a key issue in the implementation of this approach. To our knowledge this is the first time that such thermal induced distortions on the vacuum compressor gratings are characterized and compensated.