Abstract
We deposited Au-Cu-Si, an Au-based thin-film metallic glass (TFMG) of ∼50 nm thickness, as the activation layer for propagating surface plasmon resonance (PSPR)-based sensors on a BK7 glass substrate to substitute the commonly used gold layer. The film composition was tuned to yield the maximum Au content (∼65 at %), while the structure remained amorphous. The results showed that the Au-based TFMG could support surface plasmon resonance and gave rise to the extinction in the angle-resolved reflection spectrum. Using deionized water and ethyl alcohol with the refractive index difference of ∼0.03 as the analytes, the angle shift given by Au-based TFMG was 4° compared to 5° given by the Au film. Hence, Au-based TFMG is feasible to be used as the activation layer in PSPR-based sensors. Compared to the Au film, Au-based TFMG has the advantages of being less expensive, lacking grain boundary scattering, better adhesion to the substrate, and higher resistance to scratch and corrosion because of its amorphous structure with excellent mechanical properties.