Abstract
The low stretchability of plain membranes restricts the sensitivity of conventional diaphragm-based pressure and inflatable piezoelectric sensors. Using theoretical and computational tools, we characterized current limitations and explored metamaterial-inspired membranes (MetaMems) to resolve these issues. This paper develops two MetaMem pressure sensors (MPSs) to enrich the sensitivity and stretchability of the conventional sensors. Two auxetic hexagonal and kirigami honeycombs are proposed to create a negative Poisson's ratio (NPR) in the MetaMems which enables them to expand the piezo-element of sensors in both longitudinal and transverse directions much better, and consequently provides the MPSs' diaphragm a higher capability for flexural deformation. Polyvinylidene fluoride (PVDF) and polycarbonate (PC) are considered as the preferable materials for the piezo-element and MetaMem, respectively. A finite element analysis was conducted to investigate the stretchability behavior of the MetaMems and study its effect on the PVDF's polarization and sensor sensitivity. The results obtained from theoretical analysis and numerical simulations demonstrate that the proposed MetaMems enhance the sensitivity of pressure sensors up to 3.8 times more than an equivalent conventional sensor with a plain membrane. This paper introduces a new class of flexible MetaMems to advance wearable piezoelectric metasensor technologies.