Abstract
We present a novel method for the three-dimensional (3D) control of microrobots within a microfluidic chip. The microrobot body contains a hollow space, producing buoyancy that allows it to float in a microfluidic environment. The robot moves in the z direction by balancing magnetic and buoyancy forces. In coordination with the motion of stages in the xy plane, we achieved 3D microrobot control. A microgripper designed to grasp micron-scale objects was attached to the front of the robot, allowing it to hold and deliver micro-objects in three dimensions. The microrobot had four degrees of freedom and generated micronewton-order forces. We demonstrate the microrobot's utility in an experiment in which it grips a 200 μm particle and delivers it in a 3D space.