Abstract
According to the latest literature, it is difficult to measure the multiple important physical parameters inside a proton battery stack accurately and simultaneously. The present bottleneck is external or single measurements, and the multiple important physical parameters (oxygen, clamping pressure, hydrogen, voltage, current, temperature, flow, and humidity) are interrelated, and have a significant impact on the performance, life, and safety of the proton battery stack. Therefore, this study used micro-electro-mechanical systems (MEMS) technology to develop a micro oxygen sensor and a micro clamping pressure sensor, which were integrated into the 6-in-1 microsensor developed by this research team. In order to improve the output and operability of microsensors, an incremental mask was redesigned to integrate the back end of the microsensor in combination with a flexible printed circuit. Consequently, a flexible 8-in-1 (oxygen, clamping pressure, hydrogen, voltage, current, temperature, flow, and humidity) microsensor was developed and embedded in a proton battery stack for real-time microscopic measurement. Multiple micro-electro-mechanical systems technologies were used many times in the process of developing the flexible 8-in-1 microsensor in this study, including physical vapor deposition (PVD), lithography, lift-off, and wet etching. The substrate was a 50 μm-thick polyimide (PI) film, characterized by good tensile strength, high temperature resistance, and chemical resistance. The microsensor electrode used Au as the main electrode and Ti as the adhesion layer.