Simulation of Laser-Heating and Energetic Plasma Plume Expansion in Pulsed Laser Deposition of Y(3)Fe(5)O(12)

脉冲激光沉积Y(3)Fe(5)O(12)过程中激光加热和高能等离子体羽流膨胀的模拟

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Abstract

In the present study, numerically iterative models are employed to study two processes involved in the pulsed laser deposition of an Y(3)Fe(5)O(12) target. The 1D conduction heat model is used to evaluate the temperature of the target irradiated by a nano-second pulse laser, taking into account the plasma shielding effect. Further, the gas dynamics model is employed to simulate the kinetic of plasma plume expansion. The results may be important in obtaining high-quality Y(3)Fe(5)O(12) thin films.

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