Abstract
Ultrahigh rates realized by ALD-made TiN. The symmetric full-cell supercapacitors deliver a typical capacitance of 20.7 F cm(-3) at a scan rate of 1 V s(-1), and retain 4.3 F cm(-3) at high rate of 100 V s(-1). The devices can be charged and discharged for 20 000 cycles with negligible capacitance loss and with an ultralow self-discharge current (≈1 μA).