Wavefront Aberration Sensor Based on a Multichannel Diffractive Optical Element

基于多通道衍射光学元件的波前像差传感器

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Abstract

We propose a new type of a wavefront aberration sensor, that is, a Zernike matched multichannel diffractive optical filter, which performs consistent filtering of phase distributions corresponding to Zernike polynomials. The sensitivity of the new sensor is theoretically estimated. Based on the theory, we develop recommendations for its application. Test wavefronts formed using a spatial light modulator are experimentally investigated. The applicability of the new sensor for the fine-tuning of a laser collimator is assessed.

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