Abstract
Microactuators are essential for advances in micro-optics, ultrasonic transducers and microsensors, and there is a growing demand for miniaturization and improved power. Here we demonstrate the actuation of micromechanical structures based on spin-current volume effect using an amorphous magnetic film of TbFeCo with volume magnetostriction. A 2 mm-diameter circular polyimide diaphragm coated with thin TbFeCo/non-magnetic metal films is prepared as the micromechanical structure. When an alternating charge current flows through the TbFeCo/non-magnetic metal films on the diaphragm under an external magnetic field orthogonal to the charge current, an alternating spin-current flows in the non-magnetic metal film due to the spin-Hall effect. In the spin-current volume effect, the spin-current transports angular momentum from the non-magnetic metal to TbFeCo film, and the spin-transfer torque modulates the magnetization fluctuation of the TbFeCo film, causing the diaphragm to vibrate due to spin-lattice coupling. The power density of the TbFeCo/Pt films actuator is larger than 1.17 × 10(6 )W m(−3) at 20 mA charge current under 7.2 kOe magnetic field. This value is much higher than that of various existing film-type microactuators. This spin-current volume effect is effective as a new actuation mechanism for microactuators used in micro-optical systems, acoustic diagnostic equipment, and micro-fluidic systems etc.