The Measurement and Uncertainty of a Calibration Standard for the Scanning Electron Microscope

扫描电子显微镜校准标准的测量和不确定度

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Abstract

Standard Reference Material 484 is an artifact for calibrating the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000 × to 20000 ×. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumentation, measurement procedures and determination of uncertainty for SRM-484 and illustrates with data from issues 484e and 484f.

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