Current and Voltage Measurements in the Gaseous Electronics Conference RF Reference Cell

气体电子学会议射频参考单元中的电流和电压测量

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Abstract

Measurements of the electrical characteristics of discharges in the Gaseous Electronics Conference Radio-Frequency Reference Cell are reviewed here. Topics include: common sources of error in the measurements; comparisons of current and voltage data among GEC cells; the effects of gas impurities, surface conditions and the external circuitry on the reproducibility of the electrical characteristics; and comparisons of current and voltage data with results of other measurements.

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