Abstract
An all-optical non-resonant photoacoustic spectroscopy system for multicomponent gas detection based on a silicon cantilever optical microphone (SCOM) and an aseismic photoacoustic cell is proposed and demonstrated. The SCOM has a high sensitivity of over 96.25 rad/Pa with sensitivity fluctuation less than ± 1.56 dB between 5 Hz and 250 Hz. Besides, the minimal detectable pressure (MDP) of the sensor is 0.55 μPa·Hz(-1/2) at 200 Hz, which indicates that the fabricated sensor has high sensitivity and low noise level. Six different gases of CO(2), CO, CH(4), C(2)H(6), C(2)H(4), C(2)H(2) are detected at the frequency of 10 Hz, whose detection limits (3σ) are 62.66 ppb, 929.11 ppb, 1494.97 ppb, 212.94 ppb, 1153.36 ppb and 417.61 ppb, respectively. The system achieves high sensitivity and low detection limits for trace gas detection. In addition, the system exhibits seismic performance with suppressing vibration noise by 4.5 times, and achieves long-term stable operation. The proposed non-resonant all-optical PAS multi-component gas detection system exhibits the advantages of anti-vibration performance, low gas consumption and long term stability, which provides a solution for working in complex environments with inherently safe.