Abstract
Poly(dimethylsiloxane) or PDMS is an excellent material for replica molding, widely used in microfluidics research. Its low elastic modulus, or high deformability, assists its release from challenging molds, such as those with high feature density, high aspect ratios, and even negative sidewalls. However, owing to the same properties, PDMS-based microfluidic devices stretch and change shape when fluid is pushed or pulled through them. This paper shows how severe this change can be and gives a simple method for limiting this change that sacrifices few of the desirable characteristics of PDMS. A thin layer of PDMS between two rigid glass substrates is shown to drastically reduce pressure-induced shape changes while preserving deformability during mold separation and gas permeability.