Abstract
Flexible pressure sensors are widely used in different fields, especially in human motion, robot monitoring and medical treatment. Herein, a flexible pressure sensor consists of the flat top plate, and the microstructured bottom plate is developed. Both plates are made of polydimethylsiloxane (PDMS) by molding from the 3D printed template. The contact surfaces of the top and bottom plates are coated with a mixture of poly (3,4-ethylenedioxythiophene) poly (styrene sulfonate) (PEDOT:PSS) and polyurethane dispersion (PUD) as stretchable film electrodes with carbon nanotubes on the electrode surface. By employing 3D printing technology, using digital light processing (DLP), the fabrication of the sensor is low-cost and fast. The sensor models with different microstructures are first analyzed by the Finite Element Method (FEM), and then the models are fabricated and tested. The sensor with 5 × 5 hemispheres has a sensitivity of 3.54 × 10-3 S/kPa in the range of 0-22.2 kPa. The zero-temperature coefficient is -0.0064%FS/°C. The durability test is carried out for 2000 cycles, and it remains stable during the whole test. This work represents progress in flexible pressure sensing and demonstrates the advantages of 3D printing technology in sensor processing.