Abstract
Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a one-axis biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. An analytical model is presented for the design of the accelerometer, and guidelines are derived to reduce responsivity due to flow-induced contributions to the accelerometer's output. Measurements show that this microelectromechanical systems (MEMS) hair-based accelerometer has a resonance frequency of 320 Hz, a detection threshold of 0.10 ms(-2) and a dynamic range of more than 35 dB. The accelerometer exhibits a clear directional response to external accelerations and a low responsivity to airflow. Further, the accelerometer's physical limits with respect to noise levels are addressed and the possibility for short-term adaptation of the sensor to the environment is discussed.