Abstract
Current demands for flexible, individual microstructures in high quality result in high requirements for micro tools. As the tool size defines the minimum structure size, ultra-small tools are needed. To achieve tool diameters of 50 µm and lower, we investigate the complete manufacturing chain of micro machining. From the development of the machine tools and components needed to produce and apply the micro tools, the micro tools themselves, as well as the micro machining processes. Machine tools are developed with the possibility of producing the micro geometry (cutting edge design) of micro tools as well as plating processes to produce super abrasive micro grinding tools. Applying these setups, we are able to produce ultra-small micro grinding and micro milling tools with typical diameters of 50 µm and down to 4 µm. However, the application of such tools is very challenging. The article presents possibilities and limitations in manufacturing the micro tools themselves as well as microstructures made with these tools. A special emphasis will be on the influence of the tool substrate in micro milling and grain sizes in micro grinding.