Investigation of Current Effect of Suspended Graphene Pressure Sensor

悬浮石墨烯压力传感器电流效应研究

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Abstract

The current effect of passive devices is crucial for device testing. The current effect of a suspended graphene pressure sensor in the range of 0-2 mA is studied in this paper. The results show that the resistance of graphene films and the piezoresistive effect of devices exhibit stable performance within the current threshold range of 400 μA and 300 μA, respectively. Auger electron spectroscopy and Raman spectroscopy tests indicate that the resistance of graphene increases first and then decreases at high current intensity, resulting from the electrostatic adsorption of oxygen atoms in the initial phase of electrification and the Joule-induced desorption in the later phase. This study presents guiding significance for the electrical testing of suspended graphene devices.

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