Abstract
In order to optimize the sensitivity and detection accuracy of Fano resonance optical sensors, a sensing model of graphene-grating composite micro-nanostructure with high sensing performance is proposed based on the optical properties of graphene and grating. By studying the reflection spectra and field distribution characteristics of the structure, the sensing mechanism of Fano resonance generated by the structure is elaborated, and the parameters affecting the Fano resonance sensing performance are analyzed to enhance the Fano resonance sensing performance by optimizing the structural parameters, and the Fano resonance reflection spectral curve with high-sensitivity and high-quality factor (FOM) value is obtained. The results show that when the grating period P=300 nm, the grating height T1 = 110 nm, and the silver film thickness T2 = 30 nm, the sensitivity of the structure is 980 nm/RIU and the quality factor FOM is 770RIU(-1) by changing the refractive index of the material to be measured.