Micron-scale imaging using bulk ultrasonics

利用体超声技术进行微米级成像

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Abstract

An extraordinary resolution down to 50 microns is demonstrated for the first time for bulk ultrasonics, using novel micro-fabricated metamaterial lenses. The development and performance of the silicon-based Fabry-Perot type metalenses with an array of 10 micrometre square holes are discussed. Challenges in wave reception are addressed by a custom-developed micro-focal laser with a sub-micron spot size and an innovative experimental set-up together with physics based signal processing. The results provide a pathway for material diagnostics at greater depths with high resolution using micro-metalens-enhanced ultrasound as an alternative to expensive and radiation prone electromagnetic techniques.

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