Abstract
Resistance thermometry provides a time-tested method for taking temperature measurements that has been painstakingly developed over the last century. However, fundamental limits to resistance-based approaches along with a desire to reduce the cost of sensor ownership and increase sensor stability has produced considerable interest in developing photonic temperature sensors. Here we demonstrate that silicon photonic crystal cavity-based thermometers can measure temperature with uncertainities of 175 mK (k = 1), where uncertainties are dominated by ageing effects originating from the hysteresis in the device packaging materials. Our results, a ≈ 4-fold improvement over recent developments, clearly demonstate the rapid progress of silicon photonic sensors in replacing legacy devices.