Abstract
A patterned double-layer indium-tin oxide (ITO), including the first unpatterned ITO layer serving as current spreading and the second patterned ITO layer serving as light extracting, was applied to obtain uniform current spreading and high light extraction efficiency (LEE) of GaN-based ultraviolet (UV) light-emitting diodes (LEDs). Periodic pinhole patterns were formed on the second ITO layer by laser direct writing to increase the LEE of UV LED. Effects of interval of pinhole patterns on optical and electrical properties of UV LED with patterned double-layer ITO were studied by numerical simulations and experimental investigations. Due to scattering out of waveguided light trapped inside the GaN film, LEE of UV LED with patterned double-layer ITO was improved as compared to UV LED with planar double-layer ITO. As interval of pinhole patterns decreased, the light output power (LOP) of UV LED with patterned double-layer ITO increased. In addition, UV LED with patterned double-layer ITO exhibited a slight degradation of current spreading as compared to the UV LED with a planar double-layer ITO. The forward voltage of UV LED with patterned double-layer ITO increased as the interval of pinhole patterns decreased.