Abstract
Nonlinear oscillations in micro- and nanoelectromechanical systems have emerged as an exciting research area in recent years due to their promise in realizing low-power, scalable, and reconfigurable mechanical memory and logic devices. Here, we report ultralow-power mechanical memory operations utilizing the nonlinear oscillation regime of GaN microcantilevers with embedded piezotransistive AlGaN/GaN heterostructure field effect transistors as highly sensitive deflection transducers. Switching between the high and low oscillatory states of the nonlinear oscillation regime was demonstrated using a novel phase-controlled opto-mechanical excitation setup, utilizing a piezo actuator and a pulsed laser as the primary and secondary excitation sources, respectively. Laser-based photoacoustic excitation was amplified through plasmonic absorption in Au nanoparticles deposited on a transistor. Thus, the minimum switching energy required for reliable memory operations was reduced to less than a picojoule (pJ), which translates to one of the lowest ever reported, when normalized for mass.