Abstract
Cu-Cu soldering is realized under certain pressure and low temperature conditions by using a surface silver film to modify the copper microlayer structure, thus solving the problems of high thermal stress and signal delay aggravation caused by high temperature in the traditional reflow soldering process. The copper microlayer modified with silver film is obtained by electrodeposition. The surface substructure of the Cu microlayer is a nano cone-shaped protrusion. The diameter of the bottom of the cone is 500 nm∼1 μm, and the height of the cone is 1∼2 μm. The thickness of the silver film is about 320 nm, and the modification of the copper layer with silver film can effectively prevent the oxidation of the copper layer. Two silver-modified copper microlayers are placed in face-to-face contact as a soldering couple. A certain pressure and low temperature are applied to the contact area to realize the soldering and interconnection. The morphology of the soldered interface and the average shear strength of the soldered joints are analyzed by scanning electron microscopy, transmission electron microscopy and solder joint tester. It is found that under the optimal soldering parameters of soldering temperature 220 °C, soldering pressure 20 MPa and soldering time 20 min, the nano-conical projections of the Cu micrometer layer are inserted into each other to produce a physical blocking effect. The highly surface-meltable silver film effectively connects the surrounding copper layer as an intermediate buffer layer. The average shear strength of soldering joints is significantly increased. Heat treatment experiments have shown that the average shear strength can be effectively increased by heat treatment for an appropriate period of time. Prolonged exposure to heat has little effect on the average shear strength. With the special morphology of the copper microlayer structure and the nano-size effect of the silver layer, soldering can be done at low temperatures. The quality of the soldering interface is good and small soldering dimensions can be obtained.