Abstract
This study presents a channel-free, micro-well-template-assisted magnetic particle trapping method for efficient single-particle isolation without the need for microfluidic channels. Dual-surface silicon micro-well arrays were fabricated using photolithography, PE-CVD, and DRIE processes, featuring hydrophilic well interiors and hydrophobic outer surfaces to enhance trapping performance. The proposed method combines magnet-assisted sedimentation with rotational sweeping of a glass slide placed above the micro-well array, enabling rapid and uniform particle confinement within a 250 × 250 well array. Experimental results showed that the trapping efficiency increased with the well width and depth, achieving over 93.8% within three trapping cycles for optimized structures. High single-particle occupancy was obtained for wells of comparable size to the particle diameter, while deeper wells enabled stable trapping with minimal loss. The entire trapping process was completed within five minutes per cycle, demonstrating a rapid, simple, and scalable approach applicable to digital immunoassay systems for ultrasensitive biomolecule detection.