Abstract
At present, high-resolution and reliable inductive sensors have increasingly emerged as a pivotal component in the advancement of flexible electronic devices. The integration of liquid metal with flexible substrates presents a promising approach for the fabrication of inductive sensors. This paper introduces a novel paperclip-type helical coil inductive sensor, characterized by advancements in both structural design and a simplified manufacturing process. The sensor comprises a fine silicone tube filled with liquid metal, encapsulated within polydimethylsiloxane (PDMS) glue. A significant innovation of this design is its complete elimination of the need for high-precision sacrificial metal molds. This approach bypasses complex processes such as precision mold machining, demolding, and post-mold residue cleaning, thereby significantly streamlining the production work-flow. We optimized the parameters of the paperclip-type helical coil, the aspect ratio, and the number of turns, achieving the maximum sensitivity under limited conditions. Experimental results demonstrate that this sensor is capable of tensile, pressure, and non-contact distance sensing. The linearity of the tensile sensing is exceptional (R2=0.999), with consistent performance observed after 800 tensile cycles. The pressure sensing range extends from 0 to 230 kPa, and the non-contact distance sensing is effective within a range of 10 mm. Furthermore, the sensor exhibits strong performance in monitoring human physiological activities and metal distance detection, demonstrating significant application potential in flexible electronics and wearable devices.