Abstract
Vapor deposition of polymers offers precise control over polymerization, enabling the creation of uniform thin films, conformal coatings, and complex geometries. These methods produce pinhole-free films with tailored physical and chemical properties while addressing the limitations of conventional solution-based techniques. Recent advancements have extended polymer fabrication beyond thin films to include surface patterns, microstructures, and 3D architectures. This review provides an overview of vapor deposition methods, polymerization mechanisms, and processes for fabricating microstructures and 3D architectures. This review highlights the progress of vapor-deposited polymers, from simple coatings to complex, multifunctional structures. By integrating precise structural control with chemical versatility, these advancements open new opportunities for innovative material design and address the growing demands of modern applications.