Abstract
This review discusses the contribution of physical vapor deposition (PVD) processes to the development of electrochemical energy storage systems with emphasis on solid-state batteries. A brief overview of different PVD technologies and details highlighting the utility of PVD for the fabrication and characterization of individual battery materials are provided. In this context, the key methods that have been developed for the fabrication of solid electrolytes and active electrode materials with well-defined properties are described, and demonstrations of how these techniques facilitate the in-depth understanding of fundamental material properties and interfacial phenomena as well as the development of new materials are provided. Beyond the discussion of single components and interfaces, the progress on the device scale is also presented. State-of-the-art solid-state batteries, both academic and commercial types, are assessed in view of energy and power density as well as long-term stability. Finally, recent efforts to improve the power and energy density through the development of 3D-structured cells and the investigation of bulk cells are discussed.