Abstract
Flexible humidity sensors, as pivotal sensing components in the Internet of Things and intelligent era, have achieved significant progress in material innovation, fabrication engineering, and application diversification in recent years. This review systematically presents the current research status of flexible humidity sensors, focusing on the influence of novel humidity-sensitive materials(including polymers, metal oxides, carbon-based materials, and two-dimensional materials) on key performance metrics such as sensitivity, response time, and stability. The optimization effects of fabrication technologies such as screen printing, spraying, and deposition on device performance are also analyzed. Furthermore, the innovative applications of flexible humidity sensors in fields including healthcare, smart agriculture, smart homes, and human-machine interaction are elaborated in detail. These applications highlight the sensors' adaptability to diverse environmental requirements and their potential to enable intelligent monitoring and interactive systems. Finally, future technological directions for flexible humidity sensors are proposed from the perspectives of material system innovation, improvement of multi-parameter collaborative sensing performance, and optimization of adaptability to complex environments. The proposed development directions are targeted at achieving higher precision, multifunctionality, and self-powered operation, providing insights and guidance for the research and development of next-generation flexible intelligent sensing devices. By bridging material science, manufacturing engineering, and application engineering, this comprehensive review provides a forward-looking perspective on advancing flexible humidity sensing technologies for emerging intelligent systems.