Abstract
Capacitors are essential components in modern electrical systems, functioning primarily to store electrical charges and regulate current flow. Capacitive sensors, developed in the 20th century, have become crucial in various applications, including touchscreens and smart devices, due to their ability to detect both metallic and non-metallic objects with high sensitivity and low energy consumption. The advancement of microelectromechanical systems (MEMS) and nanotechnology has significantly enhanced the capabilities of capacitive sensors, leading to unprecedented sensitivity, dynamic range, and cost-effectiveness. These sensors are integral to modern devices, enabling precise measurements of proximity, pressure, strain, and other parameters. This review provides a comprehensive overview of the development, fabrication, and integration of micro and nanostructured capacitive sensors. In terms of an electric field, the working and detection principles are discussed with analytical equations and our numerical results. The focus extends to novel fabrication methods using advanced materials to enhance sensitivities for various parameters, such as proximity, force, pressure, strain, temperature, humidity, and liquid sensing. Their applications are demonstrated in wearable devices, human-machine interfaces, biomedical sensing, health monitoring, robotics control, industrial monitoring, and molecular detection. By consolidating existing research, this review offers insights into the advancements and future directions of capacitive sensor technology.