Abstract
ZnO is a promising gas sensing material for its excellent gas sensing response characteristics and long-term stability. Moreover, the improvement in the sensitivity and response speed of ZnO gas sensors can be achieved by the nanostructure fabrication. This paper proposes a facile method to deposit ZnO nanospirals using glancing angle deposition (GLAD) for application in nitric oxide (NO) sensors. ZnO nanospirals with porous characteristics have larger relative surface area and more active surfaces, compared with dense ZnO thin film. A sensor using nanospiral ZnO film shows a response factor of 16.9 to 100 ppb NO at 150 °C in 40% RH, which is 3 times larger than that of the sensor using dense ZnO film. Such a ZnO nanospiral sensor system can detect NO as low as 10 ppb which is below the NO concentration (>30 ppb) in exhaled breath of patients with asthma. The effects of working temperature and humidity on the sensor performance were investigated systematically in this work. Moreover, the sensor response showed a good selectivity to NO and high stability as the time increased up to 24 days. NO gas sensing mechanism was discussed in detail and nanospiral ZnO film sensors are promisingly applicable for exhaled human breath application compared with some other NO sensors.