Scanning Electron Microscopy 1971. Proceedings of the Fourth Annual Scanning Electron Microscope Symposium

1971年扫描电子显微镜会议论文集。第四届年度扫描电子显微镜研讨会论文集

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Abstract

Advancement of discrete frequency infrared (DFIR) spectroscopic microscopes in image quality and data throughput are critical to their use for analytical measurements. Here, we report the development and characterization of a point scanning instrument with minimal aberrations and capable of diffraction-limited performance across all fingerprint region wavelengths over arbitrarily large samples. The performance of this system is compared to commercial state of the art Fourier transform infrared (FT-IR) imaging systems. We show that for large samples or smaller set of discrete frequencies, point scanning far exceeds (∼10-100 fold) comparable data acquired with FT-IR instruments. Further we show improvements in image quality using refractive lenses that show significantly improved contrast across the spatial frequency bandwidth. Finally, we introduce the ability to image two tunable frequencies simultaneously using a single detector by means of demodulation to further speed up data acquisition and reduce the impact of scattering. Together, the advancements provide significantly better spectral quality and spatial fidelity than current state of the art imaging systems while promising to make spectral scanning even faster.

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