Abstract
In this paper, an angular position sensor (APS) designed for a resonant miniaturized scanning mirror (M-SM) is presented. The APS operates based on the principle of differential variable capacitance, significantly expanding the detectable bandwidth from a few hertz to several kilohertz. By modeling the motion characteristics, the sampling rates of the biaxial scanning angles are 1473.6 times and 539.4 times higher than those of conventional sensors. Initially, the motion characteristics model is presented as a simple harmonic motion, converting sampled capacitance into continuous capacitance. Subsequently, the nonparallel state of the M-SM and sensor is transformed into a parallel state through the space coordinate system transformation. Furthermore, a 2D nonlinear angle transfer function is developed to convert the differential capacitance into an angle, thereby mitigating the nonlinear errors resulting from large angles. Achieving an accuracy better than 0.014°, the measuring range expands from ±0.5729° (±10 mrad) to ±5.026° ( ± 87 mrad). Additionally, the capturing mode and tracking mode are proposed to monitor real-time angular changes of the M-SM with an accuracy of 0.017°. High-precision APSs have enhanced beam pointing accuracy and resolution and can thereby be used to advance the development of laser components, including light detection and ranging (LiDAR).