Manufacturing Anti-Reflective Subwavelength Structures on ZnS Using Femtosecond Laser Bessel Beam with Burst Mode

利用飞秒激光贝塞尔光束在ZnS上制造抗反射亚波长结构(脉冲串模式)

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Abstract

Increasing the transmittance of zinc sulfide (ZnS) infrared windows can effectively improve the imaging quality of infrared detection. In this study, an anti-reflective subwavelength structure (ASS) was manufactured on ZnS using a femtosecond burst Bessel laser with the goal of achieving high transmittance in the mid-infrared range. The period and depth parameters of the ASS were initially determined using the effective medium approximation (EMA) theory and subsequently optimized using the rigorous coupled-wave analysis (RCWA) method to eliminate surface Fresnel anti-reflections. The depth of the ASS increases with the number of bursts, while the structure profile transitions from Gaussian to conical. In addition, the ASS achieves 86% transmittance in the 7-10 µm range, and the average transmittance improves by 10% in the 5-12 µm range. Moreover, the wide-angle ASS with the hydrophobicity (contact angle 160°) is achieved on the ZnS window. Ultimately, the ASS on ZnS enhances the clarity of the infrared image.

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