Study on Spectral Selective Manipulation Characteristics of Surface Multilevel Micro-Nano Structures by FDTD Simulation

利用FDTD模拟研究表面多层微纳结构的光谱选择性操控特性

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Abstract

The optical filter based on the micro-nano structure on the material surface is an important optical device, which is widely used in many fields. The filter is fabricated on the substrate with different shapes and sizes of micro-nano array structure, and the wavelength selectivity is realized by adjusting the processing parameters. In this paper, the finite-difference time-domain (FDTD) method is used to simulate the spectral properties of periodic array structures on the Au surface, and the spectral response characteristics of different surface structural parameters to the incident light are obtained. The simulation results show that the periodic pore array has a directional modulation function on the reflectivity and transmittance of the material surface. In the same circular aperture array structure, the wavelength selection ability is proportional to the interval distance of the array period, but the transmission peak linewidth decreases with the increase of the interval distance. The structural spectrum of the cylindrical array is closely related to the structural period. The period of the array structure increases in proportion, the center wavelengths of the reflection and transmission peak of the spectrum are red-shifted. When the height of the array structure increases proportionally, the positions of the center wavelengths of the reflection and transmission peak remain almost unchanged. When the period of the array structure increases, the center wavelength of the reflection and transmission peaks appear red-shifted, and the line width is also narrowed. For the periodic ring array structure, as the inner diameter increases, the reflection peak is significantly red-shifted, and the smaller the ring width, the faster the red-shift of the reflection peak with the wavelength. By controlling the ratio of inner diameter-to-outer diameter, the spectral characteristics of the structured surface can be effectively controlled. These simulation results provide a basis for the preparation of optical filters in the future and a new idea for the study of micro-nano characteristic structures on the surface of materials.

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