Abstract
This paper reports the mechanical design, waveform investigation and experimental validation of an flexible-structure-based inertia-drive linear motor. The flexible structure is designed and verified with finite element analysis to meet the bandwidth requirement for high-frequency actuation. In order to improve the output velocity, non-resonance low-harmonic driving waveform is implemented and evaluated. Experimental results show that the motor is capable of an output velocity of 2.41 mm/s with the waveform, compared to 0.73 mm/s with the classic saw-tooth waveform actuation. The improvement of the non-resonance low-harmonic waveform for the flexible-structure-based motor is confirmed.