Abstract
The paper proposes a three-degrees-of-freedom flexible nano-positioning stage constructed from compliant flexures and piezoelectric thin-sheet actuators, featuring a compact size and fast dynamic responses, which can be extensively applied to the typical micro/nano-positioning applications. Meanwhile, the dynamic model of the flexible PZT nano-positioning with distributed parameter characteristics is established to distinctly reflect the piezoelectric-mechanical coupling relationship between the four flexible PZT actuators and the three outputs of such a system. Furthermore, the attitude decoupling control for the 3-DOF flexible piezoelectric nano-positioning stage is achieved by the Active Disturbance Rejection Control (ADRC) method to compensate for the positioning errors in the actual positioning process. After this, a real-time experimental apparatus with two Position-Sensitive Detectors (PSDs) is also proposed and fabricated to test the three outputs of the flexible piezoelectric thin-sheet (PZT-5A) nano-positioning stage and validate the effectiveness of the dynamic modeling method and attitude decoupling control in the piezoelectric nano-positioning stage ranges.