Abstract
Silicon is commonly used in micro/nano-electromechanical system (MEMS/NEMS) devices. Because detailed information about the friction interface in these systems is lacking, the relationship between texture shape and friction remains unclear. In this study, molecular dynamics simulations were performed to investigate the dry-friction tribological behavior of crystalline silicon, focusing on the effects of surface roughness, normal load, and sliding speed. The results show that between normal loads of 4 GPa and 8 GPa, the average frictional force exhibits significant nonlinear behavior under a sliding speed of 0.2 Å/ps. The approximate steady value of the friction coefficient is 0.39, which is in good agreement with the experimental result of 0.37. Under a normal load of 5 GPa, the friction force increases linearly from 110 nN at 0.05 Å/ps to 311 nN at 2 Å/ps. In addition, in systems with sinusoidal surface roughness, the amplitude has a greater effect on the frictional properties than the period. Among the four rough surfaces studied, A10T32 exhibits the lowest friction force and friction coefficient. This provides theoretical support for the further design of MEMS/NEMS devices with long operational lifetimes.