Comparative Study of Zirconium Nitride Multilayer Coatings: Crystallinity, In Vitro Oxidation Behaviour and Tribological Properties Deposited via Sputtering and Arc Deposition

氮化锆多层涂层对比研究:溅射法和电弧沉积法制备的涂层的结晶度、体外氧化行为和摩擦学性能

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Abstract

This study aims to evaluate and compare the properties of a biomedical clinically established zirconium nitride (ZrN) multilayer coating prepared using two different techniques: pulsed magnetron sputtering and cathodic arc deposition. The investigation focuses on the crystalline structure, grain size, in-vitro oxidation behaviour and tribological performance of these two coating techniques. Experimental findings demonstrate that the sputter deposition process resulted in a distinct crystalline structure and smaller grain size compared to the arc deposition process. Furthermore, in vitro oxidation caused oxygen to penetrate the surface of the sputtered ZrN top layer to a depth of 700 nm compared to 280 nm in the case of the arc-deposited coating. Finally, tribological testing revealed the improved wear rate of the ZrN multilayer coating applied by sputter deposition.

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