Abstract
Optical phased arrays (OPAs) are essential optical elements in applications that require the ability to manipulate the light-wavefront, such as beam focusing and light steering. To miniaturize the optical components, active metasurfaces, especially graphene metasurfaces, are used as competent alternatives. However, the metasurface cannot achieve strong resonance effect and phase control function in the mid-infrared region only relying on a single-layer graphene. Here we present a graphene-metal hybrid metasurface that can generate a specific phase or a continuous sweep in the range of a 275°-based single-layer graphene structure. A key feature of our design is that the phase adjustment mainly depends on the combination mechanism of resonance intensity and frequency modulation. An all-solid-state, electrically tunable, and reflective OPA is designed by applying the bias voltage to a different pixel metasurface. The simulation results show that the maximum deflection angle of the OPA can reach 42.716°, and the angular resolution can reach 0.62°. This design can be widely applied to mid-infrared imaging, optical sensing, and optical communication systems.