Abstract
The rapid growth of the Internet of Things (IoT) and embodied intelligence has increased the demand for sensor nodes that conserve energy and reduce data transmission, especially in resource-limited applications that rely heavily on sensors. Event-based sensors have emerged to meet this demand by reducing data redundancy and lowering power consumption. Within this domain, MEMS (Micro-Electro-Mechanical Systems) inertial switches stand out as promising alternatives to traditional commercial accelerometers and gyroscopes, catering to the widespread need for inertial sensing. This review categorizes the key aspects for optimizing the performance of MEMS inertial switches, with a focus on threshold sensitivity, directional responsiveness, and contact performance. It explores the technological pathways for achieving these objectives and highlights the wide-ranging applications of MEMS inertial switches, especially in scenarios characterized by energy constraints, large-scale deployments, and harsh environments. Additionally, the current challenges faced in the field are analyzed, and future research directions are proposed to enhance the versatility and integration of MEMS inertial switches, thereby promoting their broader adoption and utility.