Abstract
This paper demonstrates an on-chip anhydrous D-glucose sensor using a coplanar stripline (CPS) on a thin (1 [Formula: see text]m) silicon nitride membrane at terahertz (THz) frequencies. A thin layer (≈ 10 [Formula: see text]m) of D-glucose was placed in close proximity to the CPS and the transmission response was measured using a modified THz-TDS setup. The D-glucose introduces frequency-dependent changes to the effective permittivity of the CPS resulting in a modified spectral response at the receiver. Measurement results show absorption signatures at 1.42 THz and 2.07 THz corresponding to the first two significant resonances beyond 1 THz for D-glucose allowing for label-free detection. The frequency-dependent attenuation coefficient was estimated by simulation for several D-glucose layer thicknesses using a modified Lorentz model. Measurement results align with simulations and other literature that use free-space THz radiation. This work verifies on-chip THz sensing of D-glucose and presents a pathway toward on-chip sensing of other materials at THz frequencies.