Abstract
We demonstrate the application of polydimethylsiloxane (PDMS) thin films in highly sensitive pressure and oxygen sensors, designed for pressure and oxygen content measurements within the heart and blood vessels. PDMS thin film displacement as a result of pressure changes was transduced by a capacitive detection technique to produce quantitative measurement of absolute pressures. Oxygen measurements were obtained by transducing the current change between a Pt and an Ag/AgCl electrode on a glass substrate, with KCl soaked filter paper as the electrolytic media that is separated from the oxygen carrying fluid by a thin PDMS membrane. The best sensitivity for the pressure sensor was ~0.1 nA/KPa, with a noise limited resolution of ~0.09 KPa. For the oxygen sensor, the best sensitivity was ~2.75 μA for 1% change in oxygen content of the surrounding media, with a noise limited resolution of ~6.18 ppm oxygen. These experimental results agree with theoretical modeling predictions, and suggest that the semi-permeable and biocompatible PDMS can be successfully adopted as the contacting membrane in an integrated sensor design to quantify pressure and oxygen content in blood.