Abstract
Hydrophobic thin films have gained significant attention due to their broad applications in self-cleaning, anti-corrosion, anti-icing, medicine, oil-water separation, and other fields. The target hydrophobic materials can be deposited onto various surfaces thanks to the scalable and highly reproducible nature of magnetron sputtering, which is comprehensively overviewed in this review. While alternative preparation methods have been extensively analyzed, a systematic understanding of hydrophobic thin films fabricated using magnetron sputtering deposition is still absent. After outlining the fundamental mechanism of hydrophobicity, this review briefly summarizes three types of sputtering-deposited thin films that originate from oxides, polytetrafluoroethylene (PTFE), and diamond-like carbon (DLC), respectively, primarily focusing on the recent advances in their preparation, characteristics, and applications. Finally, the future applications, current challenges, and development of hydrophobic thin films are discussed, and a brief perspective on future research directions is provided.