Abstract
Electroosmotic pumps can deliver liquid without moving parts, making them suitable for microfluidic and lab-on-chip systems. Previously, alternating current electroosmotic pumps were constructed using pairs of coplanar asymmetrical interdigitated microelectrodes on the same substrate. In this work, a simpler micropumping system is developed, separating the electrodes on two substrates and breaking the symmetry by half-depositing electrodes with 3D microstructures. Numerical simulation models of the pumping system and experimental velocity profiles are used to explain the fluid motion mechanism and structure-dependent pumping performance. In addition to its efficiency and simplicity, this new pumping system also allows for the creation of a microvortex device and an active microfluidics device. This scalable micropumping system provides a way to pump liquids at microscopic or macroscopical scale in complex microfluidics systems.