Abstract
This article provides data on the scanning tunnelling microscopy (STM), atomic force microscopy (AFM) and Kelvin probe force microscopy (KPFM) images of InAs(001) surface. Using the frequency-modulation (FM) method in AFM and KPFM, atomic resolution topography and contact potential difference (CPD) images of InAs(001) surface were obtained. The InAs(001) surface reconstruction images observed by STM and AFM are compared. The effect of AFM tip condition and tip-sample distance to AFM and KPFM imaging is verified by measuring frequency shift vs. tip-sample distance spectroscopy. This data article is related to the article entitled, "Kelvin prove force microscopy and its application" (Melitz et al., 2011) [1].