Abstract
Although the solution deposition of YBa2Cu3O7-x (YBCO) superconducting films is cost effective and capable of large-scale production, further improvements in their superconductivity are necessary. In this study, a deep UV (DUV) irradiation technique combined with a low-fluorine solution process was developed to prepare YBCO films. An acrylic acidic group as the chelating agent was used in the precursor solution. The acrylic acidic group was highly sensitive to DUV light at 254 nm and significantly absorbed UV light. The coated gel films exposed to DUV light decomposed at 150 °C and copper aggregation was prevented. The UV irradiation promoted the removal of the carbon residue and other by-products in the films, increased the density and enhanced the crystallinity and superconductivity of the YBCO films. Using a solution with F/Ba = 2, YBCO films with thicknesses of 260 nm and enhanced critical current densities of nearly 8 MA/cm2 were produced on the LaAlO3 (LAO) substrates.