Abstract
A surface-acoustic-wave-driven microactuator that allows separation of the piezoelectric substrate and chip has been fabricated and characterized. By simply placing the microactuator on a disposable chip, the microactuator did not contaminate the substrate with any reagent and could easily transport droplets and powders. The microactuator also allowed mixing of heterophase materials, such as powder and droplets, in a microfluidic well to increase their chemical reaction. This microactuator will enable significant cost savings and automation of plants and research facilities.