Abstract
Tactile sensors with capability of multiaxial force perception play a vital role in robotics and human-machine interfaces. Flexible optical waveguide sensors have been an emerging paradigm in tactile sensing due to their high sensitivity, fast response, and antielectromagnetic interference. Herein, a flexible multiaxial force sensor enabled by U-shaped optical micro/nanofibers (MNFs) is reported. The MNF is embedded within an elastomer film topped with a dome-shaped protrusion. When the protrusion is subjected to vector forces, the embedded MNF undergoes anisotropic deformations, yielding time-resolved variations in light transmission. Detection of both normal and shear forces is achieved with sensitivities reaching 50.7 dB N(-1) (14% kPa(-1)) and 82.2 dB N(-1) (21% kPa(-1)), respectively. Notably, the structural asymmetry of the MNF induces asymmetrical optical modes, granting the sensor directional responses to four-directional shear forces. As proof-of-concept applications, tactile visualizations for texture and relief pattern recognition are realized with a spatial resolution of 160 µm. Moreover, a dual U-shaped MNF configuration is demonstrated as a human-machine interface for cursor manipulation. This work represents a step towards advanced multiaxial tactile sensing.