Abstract
The proton battery has facilitated a new research direction for technologies related to fuel cells and energy storage. Our R&D team has developed a prototype of a proton battery stack, but there are still problems to be solved, such as leakage and unstable power generation. Moreover, it is unlikely that the multiple important physical parameters inside the proton battery stack can be measured accurately and simultaneously. At present, external or single measurements represent the bottleneck, yet the multiple important physical parameters (oxygen, hydrogen, voltage, current, temperature, flow, and humidity) are interrelated and have a significant impact on the performance, life, and safety of the proton battery stack. This research uses micro-electro-mechanical systems (MEMS) technology to develop a micro oxygen sensor and integrates the six-in-one microsensor that our R&D team previously developed in order to improve sensor output and facilitate overall operation by redesigning the incremental mask and having this co-operate with a flexible board for sensor back-end integration, completing the development of a flexible seven-in-one (oxygen, hydrogen, voltage, current, temperature, flow, and humidity) microsensor.